Gast ::
Comparative Analysis of Canny and Watershed Edge Detection for Line-Edge Roughness (LER) Quantification in SEM Images
; ;
In
Proceedings of the 16th IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC 2025) : June 13-15, 2025, Yinchuan, Ningxia, China / publisher: Institute of Electrical and Electronics Engineers, Inc., Seiten/Artikel-Nr: 144-147
2025
Online
DOI: 10.1109/EDSSC64492.2025.11183035
Einrichtungen
Dokumenttyp
Contribution to a book/Contribution to a conference proceedings
Format
online, print
Sprache
English
Externe Identnummern
SCOPUS: SCOPUS:2-s2.0-105019955501
Interne Identnummern
RWTH-2026-04408
Datensatz-ID: 1033927
Beteiligte Länder
Germany, Peoples R China
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