616210
Lehrstuhl für Halbleitertechnik und Institut für Halbleitertechnik| ID | I:(DE-82)616210_20140620 |
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Journal Article
Improvement of nanoscale line-edge roughness by conformal deposition
Journal of micromechanics and microengineering 36(7), 075016 (2026) [10.1088/1361-6439/ae8b88]
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Journal Article
Mitigating the degradation of metal–semiconductor contacts with optimized electron beam evaporation
Micro and nano engineering 32, 100368 (2026) [10.1016/j.mne.2026.100368]
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Dissertation / PhD Thesis
Impact of dielectrics on the electronic properties of ultrasmall nanoscale silicon
Aachen : RWTH Aachen University 1 Online-Ressource : Illustrationen (2025) [10.18154/RWTH-2025-10664] = Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen, 2025
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Journal Article
Fabrication and characterization of InAs nanowire-based quantum dot structures utilizing buried bottom gates
Semiconductor science and technology 40(5), 055003 (2025) [10.1088/1361-6641/adc9db]
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Journal Article (Erratum/Correction)
Analytical description of nanowires. III. Regular cross sections for Wurtzite structures. Corrigendum
Acta crystallographica / Section B 81(Part 2), 290-290 (2025) [10.1107/S2052520625000873]
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Contribution to a book/Contribution to a conference proceedings
Comparative Analysis of Canny and Watershed Edge Detection for Line-Edge Roughness (LER) Quantification in SEM Images
Proceedings of the 16th IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC 2025) : June 13-15, 2025, Yinchuan, Ningxia, China / publisher: Institute of Electrical and Electronics Engineers, Inc.
16. IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2025, Yinchuan, NingxiaYinchuan, Ningxia, Peoples R China, 025-06-12 - 15 Jun 2025
[Piscataway, NJ] : IEEE 144-147 (2025) [10.1109/EDSSC64492.2025.11183035]
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Journal Article (Letter)
Replacing Doping in Nano-Silicon: Ultimate Miniaturization, Energy Efficiency, and Cryo-Functionality
ACS applied materials & interfaces 17(37), 52325-52335 (2025) [10.1021/acsami.5c08073]
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Journal Article
Demonstration of Low Power and Multifunctional Neurons With Only Two or Five Ferroelectric SBFETs
IEEE transactions on electron devices : ED 73(2), 1034-1039 (2025) [10.1109/TED.2025.3641606]
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Dissertation / PhD Thesis
Investigation of the release of hydrogen gas from PECVD thin films in cavities of MEMS sensors
Aachen x, 107 Seiten : Illustrationen (2025) = Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen, 2025
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Journal Article (Erratum/Correction)
Erratum: “Number series of atoms, interatomic bonds and interface bonds defining zinc-blende nanocrystals as function of size, shape and surface orientation: Analytic tools to interpret solid state spectroscopy data” [AIP Adv. 6, 085306 (2016)]
AIP Advances 15(4), 049903 (2025) [10.1063/5.0270948]
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All known publications ...
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