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Table-top EUV scatterometer MARYS with high-brightness discharge plasma source

;

In
JARA-FIT annual report 2015, Seiten/Artikel-Nr.:149-150

ImpressumJülich : Forschungszentrum

Online
URL: http://www.jara.org/de/forschung/jara-fit/news/detail/FIT-Annual-Report-2015?file=files/jara/downloads/JARA-FIT/Annual%20Reports/JARA-FIT_Annual-Report_2015.pdf

Einrichtungen

  1. Lehr- und Forschungsgebiet für Experimentalphysik (139420)
  2. Fachgruppe Physik (130000)
  3. JARA-FIT (080009)


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Dokumenttyp
Journal Article

Format
online, print

Sprache
English

Interne Identnummern
RWTH-2017-00523
Datensatz-ID: 681911

Beteiligte Länder
Germany

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The record appears in these collections:
Document types > Articles > Journal Articles
Faculty of Mathematics and Natural Sciences (Fac.1) > Department of Physics
Central and Other Institutions
Public records
Publications database
080009
130000
139420
 Record created 2017-01-12, last modified 2025-11-06
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