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Manufacture of high-aspect-ratio micro-hair sensor arrays

; ;

In
Journal of micromechanics and microengineering 15(10), Seiten/Artikel-Nr.:1904-1910

ImpressumBristol : IOP Publ.

ISSN0960-1317

Online
DOI: 10.1088/0960-1317/15/10/016


Einrichtungen

  1. ACCESS e.V. - Materials + Processes (054300)
  2. Fraunhofer-Institut für Lasertechnik - ILT (053100)
  3. Lehrstuhl für Strömungslehre und Aerodynamisches Institut (415110)



Dokumenttyp
Journal Article

Format
online, print

Sprache
English

Anmerkung
Peer reviewed article

Externe Identnummern
WOS Core Collection: WOS:000233093900024
SCOPUS: SCOPUS:2-s2.0-24144472844

Interne Identnummern
RWTH-CONV-031572
Datensatz-ID: 153110

Beteiligte Länder
Germany

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The record appears in these collections:
Document types > Articles > Journal Articles
Faculty of Mechanical Engineering (Fac.4)
Affiliated Institutes and Associations
Central and Other Institutions
Public records
Publications database
053100
054300
415110
 Record created 2013-01-28, last modified 2021-06-30
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