h1

h2

h3

h4

h5
h6
http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png

Quantitative characterization of absorber and phase defects on EUV reticles using coherent diffraction imaging

; ; ; ; ; ; ; ; ; ;

In
Journal of micro/nanolithography, MEMS and MOEMS 19(1), Seiten/Artikel-Nr.:014002

ImpressumBellingham, Wash. : SPIE

Umfang11 Seiten

ISSN1932-5150

Online
DOI: 10.1117/1.JMM.19.1.014002


Einrichtungen

  1. Lehr- und Forschungsgebiet für Experimentalphysik (139420)
  2. Fachgruppe Physik (130000)
  3. Fraunhofer-Institut für Lasertechnik - ILT (053100)
  4. JARA-FIT (080009)


Thematische Einordnung (Klassifikation)
DDC: 620


Dokumenttyp
Journal Article

Format
online

Sprache
English

Anmerkung
Peer reviewed article

Externe Identnummern
SCOPUS: SCOPUS:2-s2.0-85082983404
WOS Core Collection: WOS:000590135700005

Interne Identnummern
RWTH-2020-12232
Datensatz-ID: 808693

Beteiligte Länder
Germany, Switzerland

Lizenzstatus der Zeitschrift

 GO

Medline ; Allianz-Lizenz / DFG ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection
QR Code for this record

The record appears in these collections:
Document types > Articles > Journal Articles
Faculty of Mathematics and Natural Sciences (Fac.1) > Department of Physics
Affiliated Institutes and Associations
Central and Other Institutions
Public records
Publications database
080009
053100
130000
139420
 Record created 2020-12-14, last modified 2025-10-15
Similar records



Rate this document:

Rate this document:
1
2
3
4
5
 
(Not yet reviewed)